Our Products

Vacuum Process Equipment

Canon Tokki takes advantage of its long history and many years of technological development to manufacture and sell a wide range of equipment and other products that apply vacuum process technology.

Vacuum Deposition Equipment
CM Series
CME Series
Sputtering Equipment
Carousel-type compact sputtering system
Vertical return type sputtering system
Other sputtering system
CVD Equipment
Thermal Processing Equipment
High-vacuum annealing furnace
Canon Tokki’s Commitment to You
The equipment and specifications described above are only a few examples of what Canon Tokki can do. We apply our many years of specialized machine development and design experience in both mass production equipment and trial equipment to a variety of equipment manufacturing applications. Please do not hesitate to ask us about your needs for the equipment.

Contact Us

Please use the contact information below or the Contact Us form to send us your support related inquiries.
Please note that the time required for us to send a response will depend on the details of your inquiry.

Canon Tokki Corporation Sales Department
7-5-27 Kamikodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa
211-8501 Japan
Telephone: Tel:+81-44-738-3650 / Fax :+81-44-738-3653
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